MARC状态：已编 文献类型：西文图书 浏览次数：55
- 题名/责任者:
- Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.
- 出版发行项:
- Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, c1983.
- 载体形态项:
- x, 649 p. : ill. ; 23 cm.
- 丛编说明:
- Proceedings / The Electrochemical Society ; v. 83-10.
- 丛编统一题名:
- Proceedings (Electrochemical Society) ; v. 83-10.
- 会议名称:
- Symposium on Plasma Processing (4th : 1983 : San Francisco, Calif.)
- 附加个人名称:
- Mathad, G. S.
- 附加个人名称:
- Schwartz, G. C.
- 附加个人名称:
- Smolinsky, G.
- 论题主题:
- Plasma engineering-Congresses.
- 中图法分类号:
- O53-53
- 书目附注:
- Includes bibliographical references and indexes.
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