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题名/责任者:

Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.

出版发行项:

Berlin ; New York : Springer-Verlag, 1983.

ISBN:

3540124918 (Berlin)

ISBN:

0387124918 (U.S.)

载体形态项:

x, 556 p. : ill. ; 24 cm.

丛编题名:

Springer series in electrophysics ; v. 11

附加个人名称:

Glawischnig, H. (Hans), 1939-

附加个人名称:

Ryssel, Heiner, 1941-

附加会议名称:

International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)

论题主题:

Semiconductor doping-Congresses.

论题主题:

Ion implantation-Congresses.

中图法分类号:

TN305.3-53

书目附注:

Includes bibliographical references and index.

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