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Online Public Access Catalogue

题名/责任者:

Emerging semiconductor technology : a symposium, San Jose, CA, 28-31 Jan. 1986 / sponsored by ASTM Committee F-1 on Electronics ; Dinesh C. Gupta and Paul H. Langer, editors.

出版发行项:

Philadelphia, PA : American Society for Testing and Materials, c1987.

ISBN:

0803104596

载体形态项:

704 p. : ill. ; 24 cm.

丛编题名:

ASTM special technical publication ; 960

会议名称:

Symposium on Semiconductor Processing (4th : 1986 : San Jose, Calif.)

附加个人名称:

Gupta, D. C. (Dinesh C.)

附加个人名称:

Langer, Paul H.

附加团体名称:

ASTM Committee F-1 on Electronics.

论题主题:

Semiconductor industry-Congresses.

论题主题:

Semiconductors-Design and construction-Congresses.

中图法分类号:

T720.85

中图法分类号:

TN3-532

科图法分类号:

73.71083

一般附注:

Papers presented at the Fourth International Symposium on Semiconductor Processing.

一般附注:

"ASTM publication code number (PCN) 04-960000-46."

书目附注:

Includes bibliographies and indexes and index.

豆瓣简介：