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题名/责任者:

Plasma processing : proceedings of the third Symposium on Plasma Processing / edited by J. Dieleman, R.G. Frieser, G.S. Mathad ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.

出版发行项:

Pennington, N.J. (10 S. Main St., Pennington 08534) : Electrochemical Society, c1982.

载体形态项:

xi, 516 p. : ill. ; 23 cm.

丛编说明:

Proceedings / The Electrochemical Society ; v. 82-6

丛编统一题名:

Proceedings (Electrochemical Society) ; v. 82-6.

会议名称:

Symposium on Plasma Processing (3rd : 1981 : Denver, Colo.)

附加个人名称:

Mathad, G. S.

附加个人名称:

Frieser, R. G.

附加个人名称:

Dieleman, J.

附加团体名称:

Electrochemical Society. Electronics Division.

附加团体名称:

Electrochemical Society. Dielectrics and Insulation Division.

论题主题:

Plasma engineering-Congresses.

中图法分类号:

O53

书目附注:

Includes bibliographical references and indexes.

豆瓣简介：