MARC状态：已编 文献类型：西文图书 浏览次数：73
- 题名/责任者:
- Microcircuit engineering 81 : proceedings of the international conference on microlithography / compiled by Albertus Oosenbrug.
- 出版发行项:
- Lausanne : Swiss Federal Institute of Technology, 1981.
- 载体形态项:
- 546 p. : ill.
- 会议名称:
- International Conference on Microlithography (1981 : Lausanne)
- 中图法分类号:
- TN4-53
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