MARC状态:已编 文献类型:西文期刊 浏览次数:664
- 题名/责任者:
- Microelectronic engineering.
- 出版发行项:
- Amsterdam : North-Holland ; Tokyo : OHMSHA, 1983-
- ISSN:
- 0167-9317
- 载体形态项:
- v. : ill. ; 27 cm.
- 起止卷期:
- Vol. 1, no. 1 (Sept. 1983)- .
- 论题主题:
- Semiconductor industry-Periodicals.
- 论题主题:
- Semiconductors-Design and construction-Periodicals.
- 中图法分类号:
- TN4
- 出版周期:
- Quarterly
- 一般附注:
- Title from cover.
- 引文/参考附注:
- Chemical abstracts 0009-2258 1983-
- 编号特点附注:
- Some nos. issued in combined form.
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