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西文图书1.Glow discharge processes : sputtering and plasma etching / O461.2/C466
馆藏复本:1
可借复本:0 Brian Chapman.
Wiley, 1980.
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西文图书2.Sputtering by particle bombardment / O562.5/B421
馆藏复本:3
可借复本:1 edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].
Springer-Verlag, 1981-c1991.
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