机读格式显示(MARC)

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• 003 SCNU

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• 008 050527r20082006cc a b 001 0 eng d

• 020 __ |a 9787111231677

• 040 __ |a SCNU |c SCNU

• 050 _4 |a TK7875 |b .L48 2006

• 082 04 |a 621.3 |2 22

• 093 __ |a TM38 |2 4

• 099 __ |a CAL 022008029475

• 100 1_ |a Liu, Chang

• 245 10 |a Foundations of MEMS = |b 微机电系统基础 / |c Chang Liu著.

• 246 31 |a 微机电系统基础

• 260 __ |a 北京: |b China Machine Press, |c 2008.

• 300 __ |a xvii, 530 p. : |b ill. ; |c 25 cm.

• 440 _0 |a 经典原版书库

• 504 __ |a Includes bibliographical references (p. 519) and index.

• 534 __ |p Reprint. Originally published; |c Upper Saddle River, NJ : Pearson/Prentice Hall, c2006. |z 0131472860.

• 650 _0 |a Microelectromechanical systems.

• 920 __ |a 211060 |z 1

• 950 __ |a SCNU |f TM38/L783

• 998 __ |a BUA

• 999 __ |M zxq |m 20080514 10:46:02 |G zxq |g 20080514 11:34:14

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• 991 __ |a 022008000579

• 907 __ |a SCNU |f TM38/L783