机读格式显示(MARC)
- 000 02160nam 2200601 a 4500
- 008 981216s1982 njua b 10110 eng d
- 040 __ |a CaOONL |b eng |c CaOONL
- 055 00 |a TK7874 |b T88 1982
- 082 0_ |a 621.381/73 |2 19
- 099 __ |a CAL 022000330851 |a CAL 021999672785
- 111 2_ |a Tutorial Symposium on Semiconductor Technology |d (1982 : |c Montreal, Quebec).
- 245 00 |a Proceedings of the Tutorial Symposium on Semiconductor Technology / |c edited by Daryl Ann Doane, David B. Fraser, Dennis W. Hess.
- 260 __ |a Pennington, N.J. : |b Electrochemical Society, |c c1982.
- 300 __ |a vi, 258 p. : |b ill. ; |c 24 cm.
- 490 1_ |a Proceedings ; |v v. 82-5
- 500 __ |a "Electronics and Dielectrics and Insulation Divisions."
- 500 __ |a "Held May 10-11, 1982, in Montreal, Canada, as part of the 161st Meeting of the Society."--Pref.
- 500 __ |a Spine title: Semiconductor technology.
- 504 __ |a Includes bibliographical references and indexes.
- 650 _0 |a Integrated circuits |x Congresses.
- 650 _0 |a Semiconductors |x Congresses.
- 700 10 |a Doane, Daryl Ann.
- 700 10 |a Fraser, David B.
- 700 10 |a Hess, Dennis W.
- 710 20 |a Electrochemical Society.
- 710 20 |a Electrochemical Society. |b Electronics Division.
- 710 20 |a Electrochemical Society. |b Dielectrics and Insulation Division.
- 710 20 |a Electrochemical Society. |b Meeting |n (161st : |d 1982 : |c Montreal, Quebec).
- 740 01 |a Semiconductor technology.
- 830 _0 |a Proceedings (Electrochemical Society) ; |v v. 82-5.
- 920 __ |a 231030 |b TN3-53 |c T966S 1982 |z 1
- 950 __ |a SCNU |f TN3-53/D631
- 999 __ |t C |A gly2 |a 20050716 11:19:14 |M gly2 |m 20050716 11:19:49
- 907 __ |a SCNU |f TN3-53/D631