机读格式显示(MARC)

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• 001 0000400812

• 003 SCNU

• 005 20050716150255.0

• 008 971118s1981 sz a 100 0 eng d

• 040 __ |c TSU

• 093 __ |a TN4-53 |2 4

• 099 __ |a CALB022000634839

• 111 2_ |a International Conference on Microlithography |d (1981 : |c Lausanne)

• 245 10 |a Microcircuit engineering 81 : |b proceedings of the international conference on microlithography / |c compiled by Albertus Oosenbrug.

• 260 __ |a Lausanne : |b Swiss Federal Institute of Technology, |c 1981.

• 300 __ |a 546 p. : |b ill.

• 920 __ |a 211030 |z 2

• 950 __ |a SCNU |f TN4-53/T61

• 998 __ |a TSU

• 999 __ |t C |A wp |a 20050716 15:02:15 |M wp |m 20050716 15:02:55

• 000 1000014255

• 991 __ |a 022005009711

• 907 __ |a SCNU |f TN4-53/T61