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• 040 __ |a BUPT |c BUPT |d NUL

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• 099 __ |a CAL 022003100034

• 100 1_ |a Plummer, James D.

• 245 10 |a Silicon VLSI technology : |b fundamentals, practice and modeling = 硅超大规模集成电路工艺技术 : 理论、实践与模型 / |c James D. Plummer, Michael Deal, Peter B. Griffin著.

• 246 31 |a 硅超大规模集成电路工艺技术 : |b 理论、实践与模型

• 260 __ |a Beijing : |b Pub. House of Electronics Industry ; |b Pearson Education, |c 2003.

• 300 __ |a 18, 817 p. : |b ill. ; |c 23 cm.

• 440 _0 |a 国外电子与通信教材系列

• 504 __ |a Includes bibliographical references and index.

• 534 __ |p Reprint. Originally published: |c Upper Saddle River, NJ : Prentice Hall, c2000. |z 0130850373.

• 650 _0 |a Integrated circuits |x Very large scale integration |x Design and construction.

• 650 _0 |a Silicon.

• 650 _0 |a Silicon oxide films.

• 650 _0 |a Metal oxide semiconductors.

• 650 _0 |a Silicon-on-insulator technology.

• 700 1_ |a Deal, Michael D.

• 700 1_ |a Griffin, Peter B.

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