机读格式显示(MARC)

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• 008 810317m19811991gw a b 001 0 eng

• 010 __ |a 81004313 //r922

• 020 __ |a 0387105212 (v. 1 : U.S.)

• 020 __ |a 3540125930 (v. 2 : Berlin)

• 020 __ |a 3540105212 (v. 1 : Berlin)

• 020 __ |a 3540534288 (v. 3 : Berlin)

• 040 __ |a DLC |c DLC |d DLC |d SCT

• 050 00 |a QC176.8.S72 |b S68

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• 099 __ |a CAL 022000285893 |a CAL 021999646060 |a CAL 021999646061 |a CAL 021999625321 |a CAL 022000689902

• 245 00 |a Sputtering by particle bombardment / |c edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].

• 260 __ |a Berlin ; |a New York : |b Springer-Verlag, |c 1981-c1991.

• 300 __ |a v. 1, 2 : |b ill. ; |c 24 cm.

• 440 _0 |a Topics in applied physics ; |v v. 47, 52, 64

• 504 __ |a Includes bibliographical references and indexes.

• 505 0_ |a 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.

• 650 _0 |a Sputtering (Physics)

• 650 _0 |a Solids |x Effect of radiation on.

• 650 _0 |a Surfaces (Physics) |x Effect of radiation on.

• 700 1_ |a Behrisch, Rainer.

• 700 1_ |a Andersen, Hans Henrik.

• 740 0_ |a Particle bombardment.

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• 950 __ |a SCNU |f O562.5/B421

• 998 __ |a PUL

• 999 __ |t C |A lm2 |a 20050713 15:31:48 |M lm2 |m 20050713 15:32:19

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