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• 000 00827nam a2200241 a 4500

• 001 0000480312

• 003 SCNU

• 005 20130923155900.0

• 008 130311s2013 maua b 001 0 eng d

• 020 __ |a 9781455730582 (hbk.)

• 040 __ |a CASHL |c CASHL

• 093 __ |a TH742 |2 5

• 099 __ |a CAL 022013045452

• 100 1_ |a Klapetek, Petr.

• 245 10 |a Quantitative data processing in scanning probe microscopy : |b SPM applications for nanometrology / |c Petr Klapetek.

• 260 __ |a Waltham, MA : |b William Andrew, |c c2013.

• 300 __ |a xi, 321 p. : |b ill. ; |c 24 cm.

• 490 0_ |a Micro & nano technologies series

• 650 _0 |a Scanning probe microscopy.

• 650 _0 |a Scanning probe microscopy |x Data processing.

• 650 _0 |a Qualitative research |x Data processing.

• 921 __ |a CALIS_CEIPC_XWB |b CEIPC |c 9781455730582

• 950 __ |a SCNU |f TH742/K63