机读格式显示(MARC)

• 000 01837cas 2200505 4500

• 001 0000418412

• 003 SCNU

• 005 20080908160028.0

• 008 910719c19929999nyuqr1p 0 a0eng d

• 010 __ |a 92642366 |z sn 91002195

• 022 0_ |a 1057-7157

• 030 __ |a JMIYET

• 032 __ |a 007793 |b USPS

• 035 __ |a (OCoLC)24103550

• 040 __ |a NSDP |c NSDP |d OUCA |d NSDP |d N |d OUCA |d NIC |d DLC |d NSDP |d NST |d MH |d DLC |d MCM |d NST |d WaU |d NSDP |d NST |d MiU |d DLC |d PUL |d SCNU

• 041 __ |a eng

• 042 __ |a nsdp |a lc

• 050 00 |a TK7874 |b .J666

• 082 00 |a 621.381 |2 20

• 093 __ |a TN3 |2 4

• 098 __ |a 730B0001 |b W7075

• 099 __ |a CAL 121999002847

• 222 _0 |a Journal of microelectromechanical systems

• 245 00 |a Journal of microelectromechanical systems : |b a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems.

• 246 00 |a Microelectromechanical systems

• 260 __ |a New York, NY : |b Institute of Electrical and Electronics Engineers, |c c1992-

• 300 __ |a v. : |b ill. ; |c 28 cm.

• 310 __ |a Quarterly

• 362 0_ |a Vol. 1, no. 1 (Mar. 1992)- .

• 500 __ |a Title from cover.

• 510 2_ |a Physics abstracts |x 0036-8091 |b Mar. 1992-

• 510 2_ |a Electrical & electronics abstracts |x 0036-8105 |b Mar. 1992-

• 510 2_ |a Computer & control abstracts |x 0036-8113 |b Mar. 1992-

• 510 2_ |a Chemical abstracts |x 0009-2258

• 530 __ |a Available also on microfiche.

• 650 _0 |a Electromechanical devices |x Periodicals.

• 650 _0 |a Microelectronics |x Periodicals.

• 710 2_ |a American Society of Mechanical Engineers.

• 710 2_ |a Institute of Electrical and Electronics Engineers.

• 950 __ |a SCNU |f TN3/2

• 998 __ |a PUL

• 999 __ |t C |Z hwei3 |z 20051012 08:48:53 |M hwei3 |m 20080908 16:00:28

• 000 1900000678

• 991 __ |a 122005000371

• 907 __ |a SCNU |f TN3/2