机读格式显示(MARC)
- 000 01020cas 2200313 4500
- 008 990114c19889999nyuqr1p ^ 0udua0eng d
- 098 __ |a 730B01 |b W7041
- 099 __ |a CAL 121999030260
- 245 00 |a IEEE transactions on semiconductor manufacturing
- 260 __ |a New York, N.Y. : |b Institute of Electrical and Electronics Engineers, |c 1988-
- 300 __ |a v. : |b ill. ; |c 29cm.
- 362 0_ |a Vol. 1, no. 1 (1988)-
- 500 __ |a Description based on: Vol. 3, no. 1 (Feb. 1990)
- 550 0_ |a A publication of the IEEE Components, Hybrids, and Manufacturing Technology Society... et al.
- 710 20 |a IEEE Components, Hybrids, and Manufacturing Technology Society.
- 999 __ |t C |Z hwei3 |z 20060322 14:27:50 |M hwei3 |m 20080626 16:46:59