机读格式显示(MARC)
- 000 01447nam 2200445 a 4500
- 008 030528r20032001cc a b 001 0 eng d
- 020 __ |a 7505386263 (pbk.)
- 040 __ |a BUPT |c BUPT |d NUL
- 050 00 |a TK7871.85 |b .C25 2001
- 082 00 |a 621.3815/2 |2 21
- 099 __ |a CAL 022003097733
- 100 1_ |a Campbell, Stephen A., |d 1954-
- 245 14 |a The science and engineering of microelectronic fabrication = |b 微电子制造科学原理与工程技术 / |c Stephen A. Campbell著.
- 260 __ |a Beijing : |b Publishing House of Electronics Industry, |c 2003.
- 300 __ |a 14, 603 p. : |b ill. ; |c 24 cm.
- 504 __ |a Includes bibliographical references and index.
- 534 __ |p Reprint. Originally published: |c New York : Oxford University Press, 2001. |b 2nd ed. |z 0195136055.
- 650 _0 |a Semiconductors |x Design and construction.
- 950 __ |a SCNU |f TN302/C197-2
- 999 __ |t C |A hwei2 |a 20040623 10:14:40 |M zxq |m 20040902 15:01:01 |G zxq |g 20040902 15:01:35
- 907 __ |a SCNU |f TN302/C197-2