机读格式显示(MARC)
- 000 01315cas 2200433 4500
- 008 840123u19839999ne qrzp 0 a0eng d
- 010 __ |a 89648025 |z sn 84010739
- 035 __ |a (OCoLC)10329408
- 040 __ |a WU |c WU |d NSDP |d NST |d AIP |d NST |d DLC |d NST |d DLC |d NSDP |d NST |c PUL |d SCNU
- 050 00 |a TK7871.85 |b .M516
- 082 00 |a 621.381/52 |2 20
- 098 __ |a 736LB003 |b W7025
- 099 __ |a CAL 121999001056
- 210 0_ |a Microelectron. eng.
- 222 _0 |a Microelectronic engineering
- 245 00 |a Microelectronic engineering.
- 260 __ |a Amsterdam : |b North-Holland ; |a Tokyo : |b OHMSHA, |c 1983-
- 300 __ |a v. : |b ill. ; |c 27 cm.
- 362 0_ |a Vol. 1, no. 1 (Sept. 1983)- .
- 500 __ |a Title from cover.
- 510 2_ |a Chemical abstracts |x 0009-2258 |b 1983-
- 515 __ |a Some nos. issued in combined form.
- 650 _0 |a Semiconductor industry |x Periodicals.
- 650 _0 |a Semiconductors |x Design and construction |x Periodicals.
- 999 __ |t C |Z hwei3 |z 20051012 10:14:54 |M hwei3 |m 20080908 15:59:30