机读格式显示(MARC)

• 000 02656cam a2200337 i 4500

• 001 0000631255

• 003 SCNU

• 005 20171205155200.0

• 008 150710s2016 enka b 001 0 eng c

• 010 __ |a 2015024280

• 020 __ |a 9781119055426 (cloth)

• 040 __ |a WaSeSS/DLC |b eng |c WaSeSS |e rda

• 042 __ |a pcc

• 050 00 |a TK7875 |b .C37 2015

• 082 00 |a 621.381 |2 23

• 093 __ |a TH-39 |2 5

• 099 __ |a CAL 022016036792

• 100 1_ |a Casta?er, Luis, |e author.

• 245 10 |a Understanding MEMS : |b principles and applications / |c Luis Casta?er.

• 264 _1 |a Chichester, UK ; |a Hoboken, New Jersey : |b John Wiley & Sons, |c 2016.

• 300 __ |a xiv, 314 pages : |b illustrations ; |c 25 cm

• 336 __ |a text |2 rdacontent

• 337 __ |a unmediated |2 rdamedia

• 338 __ |a volume |2 rdacarrier

• 504 __ |a Includes bibliographical references (p. [307]-309) and index.

• 505 0_ |a Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.

• 520 __ |a The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds.Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field.Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems.Key features:Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale.Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices.Self-contained study aid featuring problems and solutions.Book companion website hosts Matlab and PSpice codes and viewgraphs.--Amazon.com.

• 650 _0 |a Microelectromechanical systems.

• 776 08 |i Online version: |a Casta?er, Luis, author. |t Understanding MEMS |d Chichester, UK ; Hoboken, New Jersey : John Wiley & Sons, 2015 |z 9781119055433 |w (DLC) 2015027790

• 920 __ |a 242430 |z 1

• 950 __ |a SCNU |f TH-39/C346