机读格式显示(MARC)
- 000 01397nam a2200373 a 4500
- 008 101217r20102008cc a b 000 0 eng d
- 082 04 |a 621.3815/2 |2 22
- 099 __ |a CAL 022010265346
- 100 1_ |a Campbell, Stephen A., |d 1954-
- 245 10 |a 微纳尺度制造工程 / |c 斯蒂芬 A. 纳贝尔著.
- 246 3_ |a Fabrication engineering at the micro and nanoscale
- 260 __ |a Beijing : |b Publishing House of Electronics Industry, |c 2010.
- 300 __ |a xx, 637 p. : |b ill. ; |c 24 cm.
- 500 __ |a Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
- 500 __ |a English title from T.p. verso.
- 504 __ |a Includes bibliographical references.
- 534 __ |p Reprint. Originally published: |c New York : Oxford University Press, 2010. |z 9780195320176 (pbk.). |z 0195320174 (pbk.)
- 650 _0 |a Semiconductors |x Design and construction.
- 700 1_ |a Campbell, Stephen A., |d 1954- |t Science and engineering of microelectronic fabrication.
- 950 __ |a SCNU |f TN405/C197-3
- 999 __ |t C |A zxq |a 20110519 09:26:09 |M zxq |m 20110519 09:29:01 |G zxq |g 20110602 09:17:27
- 907 __ |a SCNU |f TN405/C197-3