MARC状态：已编 文献类型：西文图书 浏览次数：63
- 题名/责任者:
- Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 / editors, H. Ryssel and H. Glawischnig.
- 出版发行项:
- Berlin ; New York : Springer-Verlag, 1982.
- ISBN:
- 0387118780 (U.S.)
- 载体形态项:
- xii, 372 p. : ill. ; 24 cm.
- 丛编题名:
- Springer series in electrophysics ; v. 10
- 会议名称:
- Ion Implantation School (1982 : Berchtesgaden, Germany)
- 附加个人名称:
- Ryssel, Heiner, 1941-
- 附加个人名称:
- Glawischnig, H. (Hans), 1939-
- 附加会议名称:
- International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)
- 论题主题:
- Ion implantation.
- 论题主题:
- Semiconductor doping.
- 中图法分类号:
- TN305.3-53
- 书目附注:
- Includes bibliographies and index.
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