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- 题名/责任者:
- Sputtering by particle bombardment / edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].
- 出版发行项:
- Berlin ; New York : Springer-Verlag, 1981-c1991.
- ISBN:
- 0387105212 (v. 1 : U.S.)
- ISBN:
- 3540125930 (v. 2 : Berlin)
- ISBN:
- 3540105212 (v. 1 : Berlin)
- ISBN:
- 3540534288 (v. 3 : Berlin)
- 载体形态项:
- v. 1, 2 : ill. ; 24 cm.
- 附加非控制题名:
- Particle bombardment.
- 丛编题名:
- Topics in applied physics ; v. 47, 52, 64
- 附加个人名称:
- Behrisch, Rainer.
- 附加个人名称:
- Andersen, Hans Henrik.
- 论题主题:
- Sputtering (Physics)
- 论题主题:
- Solids-Effect of radiation on.
- 论题主题:
- Surfaces (Physics)-Effect of radiation on.
- 中图法分类号:
- O562.5
- 书目附注:
- Includes bibliographical references and indexes.
- 内容附注:
- 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.
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