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题名/责任者:

微纳尺度制造工程 / 斯蒂芬 A. 纳贝尔著.

版本说明:

3rd ed.

出版发行项:

Beijing : Publishing House of Electronics Industry, 2010.

ISBN:

9787121118043

ISBN:

7121118041

载体形态项:

xx, 637 p. : ill. ; 24 cm.

变异题名:

Fabrication engineering at the micro and nanoscale

丛编说明:

国外电子与通信教材系列

个人责任者:

Campbell, Stephen A., 1954-

附加个人名称:

Campbell, Stephen A., 1954- Science and engineering of microelectronic fabrication.

论题主题:

Semiconductors-Design and construction.

中图法分类号:

TN405

一般附注:

Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.

一般附注:

English title from T.p. verso.

书目附注:

Includes bibliographical references.

原版附注:

Reprint. Originally published: New York : Oxford University Press, 2010. 9780195320176 (pbk.). 0195320174 (pbk.)

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