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题名/责任者:

Dry etching for microelectronics / edited by Ronald A. Powell.

出版发行项:

Amsterdam ; New York : North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co., 1984.

ISBN:

0444869050

载体形态项:

xi, 299 p. : ill. ; 24 cm.

丛编说明:

Materials processing--theory and practices ; v. 4

丛编统一题名:

Materials processing, theory and practices ; v. 4.

附加个人名称:

Powell, Ronald A.

论题主题:

Semiconductors-Etching.

论题主题:

Plasma etching.

中图法分类号:

TN405.2

一般附注:

Includes index.

书目附注:

Bibliography: p. 223-294.

豆瓣简介：